THERMALLY INDUCED METASTABLE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON AND SILICON-CARBON ALLOY-FILMS

被引：34

作者：

XU, XX

OKUMURA, A

MORIMOTO, A

KUMEDA, M

SHIMIZU, T

机构：

来源：

PHYSICAL REVIEW B | 1988年 / 38卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.38.8371

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：8371 / 8376

页数：6

共 14 条

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