SOME PROPERTIES OF AL-DOPED ZNO TRANSPARENT CONDUCTING FILMS PREPARED BY RF REACTIVE SPUTTERING

被引：25

作者：

IGASAKI, Y

ISHIKAWA, M

SHIMAOKA, G

机构：

[1] Shizuoka Univ, Japan

来源：

关键词：

D O I：

10.1016/0169-4332(88)90400-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：926 / 933

页数：8

共 18 条

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