ANALYSIS OF RADIATION CHEMICAL-YIELDS OF CHLORINATED POLYSTYRENE DERIVATIVES

被引：10

作者：

HARTNEY, MA ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED POLYMER SCIENCE | 1989年 / 37卷 / 03期

关键词：

D O I：

10.1002/app.1989.070370309

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：695 / 705

页数：11

共 23 条

[1] RADIOLYSIS OF RESIST POLYMERS .4. POLY(PARA-SUBSTITUTED-ALPHA-METHYLSTYRENE)S [J].

BABU, GN ;

LU, PH ;

HSU, SL ;

CHIEN, JCW .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1984, 22 (01) :213-223

[2] ANALYSIS OF THE SOLUBILITY BEHAVIOUR OF IRRADIATED POLYETHYLENE AND OTHER POLYMERS [J].

CHARLESBY, A ;

PINNER, SH .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1959, 249 (1258) :367-386

[3]

Charlesby A., 1960, ATOMIC RAD POLYM

[4] MOLECULAR-PARAMETERS AND LITHOGRAPHIC PERFORMANCE OF POLY(CHLOROMETHYLSTYRENE) - A HIGH-PERFORMANCE NEGATIVE ELECTRON RESIST [J].

CHOONG, HS ;

KAHN, FJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1121-1126

[5]

COX JD, 1970, THERMOCHEMISTRY ORGA

[6]

Dole M., 1972, RAD CHEM MACROMOLECU

[7] DETERMINATION OF KILOVOLT ELECTRON ENERGY DISSIPATION VS PENETRATION DISTANCE IN SOLID MATERIALS [J].

EVERHART, TE ;

HOFF, PH .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) :5837-&

[8] CONTRAST IN THE ELECTRON-BEAM LITHOGRAPHY OF SUBSTITUTED AROMATIC HOMOPOLYMERS AND CO-POLYMERS [J].

FEIT, ED ;

THOMPSON, LF ;

WILKINS, CW ;

WURTZ, ME ;

DOERRIES, EM ;

STILLWAGON, LE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1997-2002

[9] ELECTRON-BEAM LITHOGRAPHY OF CHLORINATED POLYSTYRENES WITH NARROW MOLECULAR-WEIGHT DISTRIBUTIONS [J].

FEIT, ED ;

STILLWAGON, LE .

POLYMER ENGINEERING AND SCIENCE, 1980, 20 (16) :1058-1063

[10] LITHOGRAPHIC EVALUATION AND PROCESSING OF CHLORINATED POLYMETHYLSTYRENE [J].

HARTNEY, MA ;

TARASCON, RG ;

NOVEMBRE, AE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :360-366

← 1 2 3 →