ADSORPTION OF NANOMETER-SIZED PALLADIUM PARTICLES ON SI(100) SURFACES

被引：17

作者：

BOONEKAMP, EP ^{[1
]}

KELLY, JJ ^{[1
]}

FOKKINK, LGJ ^{[1
]}

机构：

[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS

来源：

LANGMUIR | 1994年 / 10卷 / 11期

关键词：

D O I：

10.1021/la00023a031

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

It is shown that polymer-stabilized Pd particles, adsorbed on Si, initiate the growth of electroless Ni. The influence of the polymer (poly(vinylpyrrolidone)) on the particle size and on the surface coverage is described. While Pd particles adsorb strongly on Si, almost no adsorption is observed on SiO2. Implications of this adsorption selectivity for the production of high-resolution metal patterns on Si are briefly discussed.

引用

页码：4089 / 4094

页数：6

共 19 条

[1] THE CHEMICAL OXIDATION OF HYDROGEN-TERMINATED SILICON(111) SURFACES IN WATER STUDIED IN-SITU WITH FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
BOONEKAMP, EP
KELLY, JJ
VANDEVEN, J
SONDAG, AHM
[J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (12) : 8121 - 8127
[2] BRANDRUP J, 1989, POLYM HDB
[3] INFRARED-SPECTROSCOPY OF SI(111) SURFACES AFTER HF TREATMENT - HYDROGEN TERMINATION AND SURFACE-MORPHOLOGY
BURROWS, VA
CHABAL, YJ
HIGASHI, GS
RAGHAVACHARI, K
CHRISTMAN, SB
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (11) : 998 - 1000
[4] ELECTRICAL-PROPERTIES OF ELECTROLESS NI-P THIN-FILMS
FERNANDEZ, M
MARTINEZDUART, JM
ALBELLA, JM
[J]. ELECTROCHIMICA ACTA, 1986, 31 (01) : 55 - 57
[5] GRAF D, 1989, J VAC SCI TECHNOL A, V7, P808, DOI 10.1116/1.575845
[6] GRUNDNER M, 1987, AIP C P, V167, P329
[7] HIEMENZ PC, 1986, PRINCIPLES COLLOID S, P329
[8] IDEAL HYDROGEN TERMINATION OF THE SI-(111) SURFACE
HIGASHI, GS
CHABAL, YJ
TRUCKS, GW
RAGHAVACHARI, K
[J]. APPLIED PHYSICS LETTERS, 1990, 56 (07) : 656 - 658
[9] HOOGSTEEN W, UNPUB J COLLOID INTE
[10] LOWENHEIM FA, 1963, MODERN ELECTROPLATIN

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