STRESS-RELAXATION IN THIN ALUMINUM FILMS

被引：47

作者：

KOLESHKO, VM

BELITSKY, VF

KIRYUSHIN, IV

机构：

来源：

THIN SOLID FILMS | 1986年 / 142卷 / 02期

关键词：

D O I：

10.1016/0040-6090(86)90005-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：199 / 212

页数：14

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