VOLATILE METALLOORGANIC PRECURSORS FOR DEPOSITING INORGANIC ELECTRONIC MATERIALS

被引：89

作者：

BRADLEY, DC

机构：

[1] Department of Chemistry, Queen Mary and Westfield College, London, E1 4NS, Mile End Road

来源：

POLYHEDRON | 1994年 / 13卷 / 08期

关键词：

D O I：

10.1016/S0277-5387(00)80248-X

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

[No abstract available]

引用

页码：1111 / 1121

页数：11

共 118 条

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