TOPOGRAPHY OF SI(111) SURFACES AFTER AR+-ION BOMBARDMENT AND THERMAL ANNEALING

被引：5

作者：

FAURE, J

CLAVERIE, A

VIEU, C

BEAUVILLAIN, J

机构：

来源：

JOURNAL DE PHYSIQUE | 1987年 / 48卷 / 07期

关键词：

D O I：

10.1051/jphys:019870048070116100

中图分类号：

学科分类号：

摘要：

引用

页码：1161 / 1170

页数：10

共 30 条

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