INFLUENCE OF ATOMIC-HYDROGEN ON THE GROWTH REACTIONS OF AMORPHOUS BORON FILMS IN A LOW-PRESSURE B2H6+HE+H2 PLASMA

被引：25

作者：

KOMATSU, S

MORIYOSHI, Y

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 04期

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D O I：

10.1063/1.341738

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1878 / 1884

页数：7

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共 20 条

[1] MASS SPECTROMETRIC INVESTIGATION OF PYROLYSIS OF BORANES .4. DIBORANE [J].

BAYLIS, AB ;

PRESSLEY, GA ;

STAFFORD, FE .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1966, 88 (11) :2428-&

[2] RATE-DETERMINING REACTIONS AND SURFACE SPECIES IN CVD OF SILICON .1. THE SIH4-HCL-H2 SYSTEM [J].

BLOEM, J ;

CLAASSEN, WAP .

JOURNAL OF CRYSTAL GROWTH, 1980, 49 (03) :435-444

[3] ANALYSIS OF ION-MOLECULE REACTIONS IN GASEOUS H2, D2, AND HD BY ION CYCLOTRON RESONANCE TECHNIQUES [J].

BOWERS, MT ;

ELLEMAN, DD ;

KING, J .

JOURNAL OF CHEMICAL PHYSICS, 1969, 50 (11) :4787-+

[4] BORON COMPOUND PROTECTIVE COATINGS PREPARED BY MEANS OF LOW-PRESSURE PLASMA CVD [J].

BRAGANZA, C ;

VEPREK, S ;

GRONER, P .

JOURNAL OF NUCLEAR MATERIALS, 1979, 85-6 (DEC) :1133-1137

[5] MECHANISM OF SI POLYCRYSTALLINE GROWTH ON A SI3N4 SUBSTRATE FROM SIH4/H2 AT REDUCED PRESSURES [J].

CADORET, R ;

HOTTIER, F .

JOURNAL OF CRYSTAL GROWTH, 1983, 64 (03) :583-592

[6] MECHANISMS OF SILICON MONOCRYSTALLINE GROWTH FROM SIH4/H-2 AT REDUCED PRESSURES [J].

CADORET, R ;

HOTTIER, F .

JOURNAL OF CRYSTAL GROWTH, 1983, 61 (02) :259-274

[7] THE DEPOSITION OF SILICON FROM SILANE IN A LOW-PRESSURE HOT-WALL SYSTEM [J].

CLAASSEN, WAP ;

BLOEM, J ;

VALKENBURG, WGJN ;

VANDENBREKEL, CHJ .

JOURNAL OF CRYSTAL GROWTH, 1982, 57 (02) :259-266

[8] ION-ASSISTED AND ELECTRON-ASSISTED GAS-SURFACE CHEMISTRY - IMPORTANT EFFECT IN PLASMA-ETCHING [J].

COBURN, JW ;

WINTERS, HF .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) :3189-3196

[9]

EVERSTEYN FC, 1974, PHILIPS RES REP, V29, P45

[10] DIRECT DETECTION OF BORANE MOLECULE + BORYL RADICAL BY MASS SPECTROMETRY [J].

FEHLNER, TP ;

KOSKI, WS .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1964, 86 (13) :2733-&