NONTHERMAL FEATURES OF ATMOSPHERIC-PRESSURE ARGON AND HELIUM MICROWAVE INDUCED PLASMAS OBSERVED BY LASER-LIGHT THOMSON SCATTERING AND RAYLEIGH-SCATTERING

Laser-light Thomson scattering and Rayleigh scattering have been measured from a microwave-induced plasma sustained at atmospheric pressure, using both argon and helium as a support gas. The measurements were performed at several spatial positions in each plasma, and at forward microwave power levels of 350 W for argon, and at 350 W and 100 W for helium. It was found from these measurements that both argon and helium plasmas deviate substantially from local thermodynamic equilibrium (LTE), Measured electron temperatures range from 13 000-21 500 K, whereas gas temperatures are generally lower by a factor of 2 to 10, depending on the support gas and the spatial position in the discharge. At the same forward microwave power, the electron temperature of the helium plasma is about 3500-7000 K higher than that of the argon plasma. Yet, the argon plasma has a higher electron number density than the helium plasma. Electron number densities in both argon and helium plasmas are roughly two to three orders of magnitude lower than what LTE would predict, based on the measured electron temperatures and the Saha Equation. Even more interestingly, signals in the far-wing portion of the Thomson-scattering spectrum were found to be significantly higher than are predicted by a fitted Maxwellian curve, indicating that there exists an over-population of high-energy electrons. It is concluded that, compared to the inductively coupled plasma, the microwave-induced plasma is highly non-thermal and remains in an ionizing mode in the analytical zone. © 1990.