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SI SURFACE CLEANING AND EPITAXIAL-GROWTH OF GAAS ON SI BY ELECTRON-CYCLOTRON RESONANCE PLASMA-EXCITED MOLECULAR-BEAM-EPITAXY AT LOW-TEMPERATURES
被引:22
作者
:
SHIBATA, T
论文数:
0
引用数:
0
h-index:
0
SHIBATA, T
KONDO, N
论文数:
0
引用数:
0
h-index:
0
KONDO, N
NANISHI, Y
论文数:
0
引用数:
0
h-index:
0
NANISHI, Y
机构
:
来源
:
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
|
1989年
/ 136卷
/ 11期
关键词
:
D O I
:
10.1149/1.2096471
中图分类号
:
O646 [电化学、电解、磁化学];
学科分类号
:
081704 ;
摘要
:
引用
收藏
页码:3459 / 3462
页数:4
相关论文
共 9 条
[1]
WARPAGE OF GAAS-ON-SI WAFERS AND ITS REDUCTION BY SELECTIVE GROWTH OF GAAS THROUGH A SILICON SHADOW MASK BY MOLECULAR-BEAM EPITAXY
CHAND, N
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
CHAND, N
VANDERZIEL, JP
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
VANDERZIEL, JP
WEINER, JS
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
WEINER, JS
SERGENT, AM
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
SERGENT, AM
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
CHO, AY
GRIM, KA
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
GRIM, KA
[J].
APPLIED PHYSICS LETTERS,
1988,
53
(03)
: 225
-
227
[2]
HETEROEPITAXY OF GAAS ON SI - THE EFFECT OF INSITU THERMAL ANNEALING UNDER ASH3
FREUNDLICH, A
论文数:
0
引用数:
0
h-index:
0
FREUNDLICH, A
GRENET, JC
论文数:
0
引用数:
0
h-index:
0
GRENET, JC
NEU, G
论文数:
0
引用数:
0
h-index:
0
NEU, G
LEYCURAS, A
论文数:
0
引用数:
0
h-index:
0
LEYCURAS, A
VERIE, C
论文数:
0
引用数:
0
h-index:
0
VERIE, C
[J].
APPLIED PHYSICS LETTERS,
1988,
52
(23)
: 1976
-
1978
[3]
GAAS HETEROEPITAXIAL GROWTH ON SI FOR SOLAR-CELLS
ITOH, Y
论文数:
0
引用数:
0
h-index:
0
ITOH, Y
NISHIOKA, T
论文数:
0
引用数:
0
h-index:
0
NISHIOKA, T
YAMAMOTO, A
论文数:
0
引用数:
0
h-index:
0
YAMAMOTO, A
YAMAGUCHI, M
论文数:
0
引用数:
0
h-index:
0
YAMAGUCHI, M
[J].
APPLIED PHYSICS LETTERS,
1988,
52
(19)
: 1617
-
1618
[4]
INFLUENCE OF ANNEALING AND SUBSTRATE ORIENTATION ON METALORGANIC CHEMICAL VAPOR-DEPOSITION GAAS ON SILICON HETEROEPITAXY
KALISKI, RW
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
KALISKI, RW
ITO, CR
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
ITO, CR
MCINTYRE, DG
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
MCINTYRE, DG
FENG, M
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
FENG, M
KIM, HB
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
KIM, HB
BEAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
BEAN, R
ZANIO, K
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
ZANIO, K
HSIEH, KC
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
HSIEH, KC
[J].
JOURNAL OF APPLIED PHYSICS,
1988,
64
(03)
: 1196
-
1200
[5]
KONDO N, 1988, AIP C P, V167, P320
[6]
ROOM-TEMPERATURE LASER OPERATION OF AIGAAS GAAS DOUBLE HETEROSTRUCTURES FABRICATED ON SI SUBSTRATES BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
SAKAI, S
论文数:
0
引用数:
0
h-index:
0
机构:
Nagoya Inst of Technology, Nagoya, Jpn, Nagoya Inst of Technology, Nagoya, Jpn
SAKAI, S
SOGA, T
论文数:
0
引用数:
0
h-index:
0
机构:
Nagoya Inst of Technology, Nagoya, Jpn, Nagoya Inst of Technology, Nagoya, Jpn
SOGA, T
TAKEYASU, M
论文数:
0
引用数:
0
h-index:
0
机构:
Nagoya Inst of Technology, Nagoya, Jpn, Nagoya Inst of Technology, Nagoya, Jpn
TAKEYASU, M
UMENO, M
论文数:
0
引用数:
0
h-index:
0
机构:
Nagoya Inst of Technology, Nagoya, Jpn, Nagoya Inst of Technology, Nagoya, Jpn
UMENO, M
[J].
APPLIED PHYSICS LETTERS,
1986,
48
(06)
: 413
-
414
[7]
DEGRADATION OF GAAS-LASERS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION ON SI SUBSTRATES
VANDERZIEL, JP
论文数:
0
引用数:
0
h-index:
0
VANDERZIEL, JP
DUPUIS, RD
论文数:
0
引用数:
0
h-index:
0
DUPUIS, RD
LOGAN, RA
论文数:
0
引用数:
0
h-index:
0
LOGAN, RA
PINZONE, CJ
论文数:
0
引用数:
0
h-index:
0
PINZONE, CJ
[J].
APPLIED PHYSICS LETTERS,
1987,
51
(02)
: 89
-
91
[8]
LOW THRESHOLD PULSED AND CONTINUOUS LASER OSCILLATION FROM ALGAAS/GAAS DOUBLE HETEROSTRUCTURES GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION ON SI SUBSTRATES
VANDERZIEL, JP
论文数:
0
引用数:
0
h-index:
0
VANDERZIEL, JP
DUPUIS, RD
论文数:
0
引用数:
0
h-index:
0
DUPUIS, RD
LOGAN, RA
论文数:
0
引用数:
0
h-index:
0
LOGAN, RA
MIKULYAK, RM
论文数:
0
引用数:
0
h-index:
0
MIKULYAK, RM
PINZONE, CJ
论文数:
0
引用数:
0
h-index:
0
PINZONE, CJ
SAVAGE, A
论文数:
0
引用数:
0
h-index:
0
SAVAGE, A
[J].
APPLIED PHYSICS LETTERS,
1987,
50
(08)
: 454
-
456
[9]
SELECTIVE AREA GROWTH OF GAAS BY ELECTRON-CYCLOTRON RESONANCE PLASMA-EXCITED MOLECULAR-BEAM EPITAXY (ECR-MBE)
YAMAMOTO, N
论文数:
0
引用数:
0
h-index:
0
YAMAMOTO, N
KONDO, N
论文数:
0
引用数:
0
h-index:
0
KONDO, N
NANISHI, Y
论文数:
0
引用数:
0
h-index:
0
NANISHI, Y
[J].
JOURNAL OF CRYSTAL GROWTH,
1989,
96
(03)
: 705
-
707
←
1
→
共 9 条
[1]
WARPAGE OF GAAS-ON-SI WAFERS AND ITS REDUCTION BY SELECTIVE GROWTH OF GAAS THROUGH A SILICON SHADOW MASK BY MOLECULAR-BEAM EPITAXY
CHAND, N
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
CHAND, N
VANDERZIEL, JP
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
VANDERZIEL, JP
WEINER, JS
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
WEINER, JS
SERGENT, AM
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
SERGENT, AM
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
CHO, AY
GRIM, KA
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,READING,PA 19601
AT&T BELL LABS,READING,PA 19601
GRIM, KA
[J].
APPLIED PHYSICS LETTERS,
1988,
53
(03)
: 225
-
227
[2]
HETEROEPITAXY OF GAAS ON SI - THE EFFECT OF INSITU THERMAL ANNEALING UNDER ASH3
FREUNDLICH, A
论文数:
0
引用数:
0
h-index:
0
FREUNDLICH, A
GRENET, JC
论文数:
0
引用数:
0
h-index:
0
GRENET, JC
NEU, G
论文数:
0
引用数:
0
h-index:
0
NEU, G
LEYCURAS, A
论文数:
0
引用数:
0
h-index:
0
LEYCURAS, A
VERIE, C
论文数:
0
引用数:
0
h-index:
0
VERIE, C
[J].
APPLIED PHYSICS LETTERS,
1988,
52
(23)
: 1976
-
1978
[3]
GAAS HETEROEPITAXIAL GROWTH ON SI FOR SOLAR-CELLS
ITOH, Y
论文数:
0
引用数:
0
h-index:
0
ITOH, Y
NISHIOKA, T
论文数:
0
引用数:
0
h-index:
0
NISHIOKA, T
YAMAMOTO, A
论文数:
0
引用数:
0
h-index:
0
YAMAMOTO, A
YAMAGUCHI, M
论文数:
0
引用数:
0
h-index:
0
YAMAGUCHI, M
[J].
APPLIED PHYSICS LETTERS,
1988,
52
(19)
: 1617
-
1618
[4]
INFLUENCE OF ANNEALING AND SUBSTRATE ORIENTATION ON METALORGANIC CHEMICAL VAPOR-DEPOSITION GAAS ON SILICON HETEROEPITAXY
KALISKI, RW
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
KALISKI, RW
ITO, CR
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
ITO, CR
MCINTYRE, DG
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
MCINTYRE, DG
FENG, M
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
FENG, M
KIM, HB
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
KIM, HB
BEAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
BEAN, R
ZANIO, K
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
ZANIO, K
HSIEH, KC
论文数:
0
引用数:
0
h-index:
0
机构:
FORD AEROSP CORP,DIV AERONUTRON,NEWPORT BEACH,CA 92658
HSIEH, KC
[J].
JOURNAL OF APPLIED PHYSICS,
1988,
64
(03)
: 1196
-
1200
[5]
KONDO N, 1988, AIP C P, V167, P320
[6]
ROOM-TEMPERATURE LASER OPERATION OF AIGAAS GAAS DOUBLE HETEROSTRUCTURES FABRICATED ON SI SUBSTRATES BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
SAKAI, S
论文数:
0
引用数:
0
h-index:
0
机构:
Nagoya Inst of Technology, Nagoya, Jpn, Nagoya Inst of Technology, Nagoya, Jpn
SAKAI, S
SOGA, T
论文数:
0
引用数:
0
h-index:
0
机构:
Nagoya Inst of Technology, Nagoya, Jpn, Nagoya Inst of Technology, Nagoya, Jpn
SOGA, T
TAKEYASU, M
论文数:
0
引用数:
0
h-index:
0
机构:
Nagoya Inst of Technology, Nagoya, Jpn, Nagoya Inst of Technology, Nagoya, Jpn
TAKEYASU, M
UMENO, M
论文数:
0
引用数:
0
h-index:
0
机构:
Nagoya Inst of Technology, Nagoya, Jpn, Nagoya Inst of Technology, Nagoya, Jpn
UMENO, M
[J].
APPLIED PHYSICS LETTERS,
1986,
48
(06)
: 413
-
414
[7]
DEGRADATION OF GAAS-LASERS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION ON SI SUBSTRATES
VANDERZIEL, JP
论文数:
0
引用数:
0
h-index:
0
VANDERZIEL, JP
DUPUIS, RD
论文数:
0
引用数:
0
h-index:
0
DUPUIS, RD
LOGAN, RA
论文数:
0
引用数:
0
h-index:
0
LOGAN, RA
PINZONE, CJ
论文数:
0
引用数:
0
h-index:
0
PINZONE, CJ
[J].
APPLIED PHYSICS LETTERS,
1987,
51
(02)
: 89
-
91
[8]
LOW THRESHOLD PULSED AND CONTINUOUS LASER OSCILLATION FROM ALGAAS/GAAS DOUBLE HETEROSTRUCTURES GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION ON SI SUBSTRATES
VANDERZIEL, JP
论文数:
0
引用数:
0
h-index:
0
VANDERZIEL, JP
DUPUIS, RD
论文数:
0
引用数:
0
h-index:
0
DUPUIS, RD
LOGAN, RA
论文数:
0
引用数:
0
h-index:
0
LOGAN, RA
MIKULYAK, RM
论文数:
0
引用数:
0
h-index:
0
MIKULYAK, RM
PINZONE, CJ
论文数:
0
引用数:
0
h-index:
0
PINZONE, CJ
SAVAGE, A
论文数:
0
引用数:
0
h-index:
0
SAVAGE, A
[J].
APPLIED PHYSICS LETTERS,
1987,
50
(08)
: 454
-
456
[9]
SELECTIVE AREA GROWTH OF GAAS BY ELECTRON-CYCLOTRON RESONANCE PLASMA-EXCITED MOLECULAR-BEAM EPITAXY (ECR-MBE)
YAMAMOTO, N
论文数:
0
引用数:
0
h-index:
0
YAMAMOTO, N
KONDO, N
论文数:
0
引用数:
0
h-index:
0
KONDO, N
NANISHI, Y
论文数:
0
引用数:
0
h-index:
0
NANISHI, Y
[J].
JOURNAL OF CRYSTAL GROWTH,
1989,
96
(03)
: 705
-
707
←
1
→