SELECTIVE AREA GROWTH OF GAAS BY ELECTRON-CYCLOTRON RESONANCE PLASMA-EXCITED MOLECULAR-BEAM EPITAXY (ECR-MBE)

被引:13
作者
YAMAMOTO, N
KONDO, N
NANISHI, Y
机构
关键词
D O I
10.1016/0022-0248(89)90072-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:705 / 707
页数:3
相关论文
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