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SELECTIVE AREA GROWTH OF GAAS BY ELECTRON-CYCLOTRON RESONANCE PLASMA-EXCITED MOLECULAR-BEAM EPITAXY (ECR-MBE)
被引:13
作者
:
YAMAMOTO, N
论文数:
0
引用数:
0
h-index:
0
YAMAMOTO, N
KONDO, N
论文数:
0
引用数:
0
h-index:
0
KONDO, N
NANISHI, Y
论文数:
0
引用数:
0
h-index:
0
NANISHI, Y
机构
:
来源
:
JOURNAL OF CRYSTAL GROWTH
|
1989年
/ 96卷
/ 03期
关键词
:
D O I
:
10.1016/0022-0248(89)90072-9
中图分类号
:
O7 [晶体学];
学科分类号
:
0702 ;
070205 ;
0703 ;
080501 ;
摘要
:
引用
收藏
页码:705 / 707
页数:3
相关论文
共 10 条
[1]
GAAS PLANAR TECHNOLOGY BY MOLECULAR-BEAM EPITAXY (MBE)
[J].
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
CHO, AY
;
BALLAMY, WC
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BALLAMY, WC
.
JOURNAL OF APPLIED PHYSICS,
1975,
46
(02)
:783
-785
[2]
SELECTIVE AREA GROWTH OF GALLIUM-ARSENIDE BY METALORGANIC VAPOR-PHASE EPITAXY
[J].
GHOSH, C
论文数:
0
引用数:
0
h-index:
0
GHOSH, C
;
LAYMAN, RL
论文数:
0
引用数:
0
h-index:
0
LAYMAN, RL
.
APPLIED PHYSICS LETTERS,
1984,
45
(11)
:1229
-1231
[3]
SELECTIVE GROWTH OF GAAS IN THE MOMBE AND MOCVD SYSTEMS
[J].
HEINECKE, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
HEINECKE, H
;
BRAUERS, A
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
BRAUERS, A
;
GRAFAHREND, F
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
GRAFAHREND, F
;
PLASS, C
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
PLASS, C
;
PUTZ, N
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
PUTZ, N
;
WERNER, K
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
WERNER, K
;
WEYERS, M
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
WEYERS, M
;
LUTH, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
LUTH, H
;
BALK, P
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
BALK, P
.
JOURNAL OF CRYSTAL GROWTH,
1986,
77
(1-3)
:303
-309
[4]
SELECTIVE EPITAXIAL-GROWTH OF GAAS BY LOW-PRESSURE MOVPE
[J].
KAMON, K
论文数:
0
引用数:
0
h-index:
0
KAMON, K
;
TAKAGISHI, S
论文数:
0
引用数:
0
h-index:
0
TAKAGISHI, S
;
MORI, H
论文数:
0
引用数:
0
h-index:
0
MORI, H
.
JOURNAL OF CRYSTAL GROWTH,
1985,
73
(01)
:73
-76
[5]
KONDO N, 1988, AIP C P, V167
[6]
SELECTIVE EPITAXIAL-GROWTH OF GALLIUM-ARSENIDE BY MOLECULAR-BEAM EPITAXY
[J].
OKAMOTO, A
论文数:
0
引用数:
0
h-index:
0
OKAMOTO, A
;
OHATA, K
论文数:
0
引用数:
0
h-index:
0
OHATA, K
.
APPLIED PHYSICS LETTERS,
1987,
51
(19)
:1512
-1514
[7]
A COMPARATIVE-STUDY OF GA(CH3)3 AND GA(C2H5)3 IN THE MOMBE OF GAAS
[J].
PUTZ, N
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
PUTZ, N
;
HEINECKE, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
HEINECKE, H
;
HEYEN, M
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
HEYEN, M
;
BALK, P
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
BALK, P
;
WEYERS, M
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
WEYERS, M
;
LUTH, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
LUTH, H
.
JOURNAL OF CRYSTAL GROWTH,
1986,
74
(02)
:292
-300
[8]
MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS USING TRIMETHYLGALLIUM AS A GA SOURCE
[J].
TOKUMITSU, E
论文数:
0
引用数:
0
h-index:
0
TOKUMITSU, E
;
KUDOU, Y
论文数:
0
引用数:
0
h-index:
0
KUDOU, Y
;
KONAGAI, M
论文数:
0
引用数:
0
h-index:
0
KONAGAI, M
;
TAKAHASHI, K
论文数:
0
引用数:
0
h-index:
0
TAKAHASHI, K
.
JOURNAL OF APPLIED PHYSICS,
1984,
55
(08)
:3163
-3165
[9]
STRUCTURAL-ANALYSIS AND OPTICAL CHARACTERIZATION OF LOW-LOSS GAAS WAVE-GUIDES FABRICATED BY SELECTIVE EPITAXY
[J].
VODJDANI, N
论文数:
0
引用数:
0
h-index:
0
VODJDANI, N
;
ERMAN, M
论文数:
0
引用数:
0
h-index:
0
ERMAN, M
;
THEETEN, JB
论文数:
0
引用数:
0
h-index:
0
THEETEN, JB
.
JOURNAL OF CRYSTAL GROWTH,
1985,
71
(01)
:141
-148
[10]
LOW-TEMPERATURE SELECTIVE GROWTH OF GAAS BY ALTERNATELY SUPPLYING MOLECULAR-BEAM EPITAXY
[J].
YOKOYAMA, S
论文数:
0
引用数:
0
h-index:
0
YOKOYAMA, S
;
OOGI, J
论文数:
0
引用数:
0
h-index:
0
OOGI, J
;
YUI, D
论文数:
0
引用数:
0
h-index:
0
YUI, D
;
KAWABE, M
论文数:
0
引用数:
0
h-index:
0
KAWABE, M
.
JOURNAL OF CRYSTAL GROWTH,
1989,
95
(1-4)
:32
-34
←
1
→
共 10 条
[1]
GAAS PLANAR TECHNOLOGY BY MOLECULAR-BEAM EPITAXY (MBE)
[J].
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
CHO, AY
;
BALLAMY, WC
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BALLAMY, WC
.
JOURNAL OF APPLIED PHYSICS,
1975,
46
(02)
:783
-785
[2]
SELECTIVE AREA GROWTH OF GALLIUM-ARSENIDE BY METALORGANIC VAPOR-PHASE EPITAXY
[J].
GHOSH, C
论文数:
0
引用数:
0
h-index:
0
GHOSH, C
;
LAYMAN, RL
论文数:
0
引用数:
0
h-index:
0
LAYMAN, RL
.
APPLIED PHYSICS LETTERS,
1984,
45
(11)
:1229
-1231
[3]
SELECTIVE GROWTH OF GAAS IN THE MOMBE AND MOCVD SYSTEMS
[J].
HEINECKE, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
HEINECKE, H
;
BRAUERS, A
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
BRAUERS, A
;
GRAFAHREND, F
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
GRAFAHREND, F
;
PLASS, C
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
PLASS, C
;
PUTZ, N
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
PUTZ, N
;
WERNER, K
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
WERNER, K
;
WEYERS, M
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
WEYERS, M
;
LUTH, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
LUTH, H
;
BALK, P
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
BALK, P
.
JOURNAL OF CRYSTAL GROWTH,
1986,
77
(1-3)
:303
-309
[4]
SELECTIVE EPITAXIAL-GROWTH OF GAAS BY LOW-PRESSURE MOVPE
[J].
KAMON, K
论文数:
0
引用数:
0
h-index:
0
KAMON, K
;
TAKAGISHI, S
论文数:
0
引用数:
0
h-index:
0
TAKAGISHI, S
;
MORI, H
论文数:
0
引用数:
0
h-index:
0
MORI, H
.
JOURNAL OF CRYSTAL GROWTH,
1985,
73
(01)
:73
-76
[5]
KONDO N, 1988, AIP C P, V167
[6]
SELECTIVE EPITAXIAL-GROWTH OF GALLIUM-ARSENIDE BY MOLECULAR-BEAM EPITAXY
[J].
OKAMOTO, A
论文数:
0
引用数:
0
h-index:
0
OKAMOTO, A
;
OHATA, K
论文数:
0
引用数:
0
h-index:
0
OHATA, K
.
APPLIED PHYSICS LETTERS,
1987,
51
(19)
:1512
-1514
[7]
A COMPARATIVE-STUDY OF GA(CH3)3 AND GA(C2H5)3 IN THE MOMBE OF GAAS
[J].
PUTZ, N
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
PUTZ, N
;
HEINECKE, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
HEINECKE, H
;
HEYEN, M
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
HEYEN, M
;
BALK, P
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
BALK, P
;
WEYERS, M
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
WEYERS, M
;
LUTH, H
论文数:
0
引用数:
0
h-index:
0
机构:
RHEIN WESTFAL TH AACHEN,BEREICH SONDERFORSCH 202,D-5100 AACHEN,FED REP GER
LUTH, H
.
JOURNAL OF CRYSTAL GROWTH,
1986,
74
(02)
:292
-300
[8]
MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS USING TRIMETHYLGALLIUM AS A GA SOURCE
[J].
TOKUMITSU, E
论文数:
0
引用数:
0
h-index:
0
TOKUMITSU, E
;
KUDOU, Y
论文数:
0
引用数:
0
h-index:
0
KUDOU, Y
;
KONAGAI, M
论文数:
0
引用数:
0
h-index:
0
KONAGAI, M
;
TAKAHASHI, K
论文数:
0
引用数:
0
h-index:
0
TAKAHASHI, K
.
JOURNAL OF APPLIED PHYSICS,
1984,
55
(08)
:3163
-3165
[9]
STRUCTURAL-ANALYSIS AND OPTICAL CHARACTERIZATION OF LOW-LOSS GAAS WAVE-GUIDES FABRICATED BY SELECTIVE EPITAXY
[J].
VODJDANI, N
论文数:
0
引用数:
0
h-index:
0
VODJDANI, N
;
ERMAN, M
论文数:
0
引用数:
0
h-index:
0
ERMAN, M
;
THEETEN, JB
论文数:
0
引用数:
0
h-index:
0
THEETEN, JB
.
JOURNAL OF CRYSTAL GROWTH,
1985,
71
(01)
:141
-148
[10]
LOW-TEMPERATURE SELECTIVE GROWTH OF GAAS BY ALTERNATELY SUPPLYING MOLECULAR-BEAM EPITAXY
[J].
YOKOYAMA, S
论文数:
0
引用数:
0
h-index:
0
YOKOYAMA, S
;
OOGI, J
论文数:
0
引用数:
0
h-index:
0
OOGI, J
;
YUI, D
论文数:
0
引用数:
0
h-index:
0
YUI, D
;
KAWABE, M
论文数:
0
引用数:
0
h-index:
0
KAWABE, M
.
JOURNAL OF CRYSTAL GROWTH,
1989,
95
(1-4)
:32
-34
←
1
→