NEW DEVELOPMENT IN ION-IMPLANTATION AND RTP EQUIPMENT FOR HIGH PRODUCTIVITY

被引：2

作者：

MCKENNA, CM

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90222-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：448 / 455

页数：8

共 25 条

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