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ANALYSIS OF BOROPHOSPHOSILICATE GLASS-FILMS BY INDUCTIVELY COUPLED PLASMA-ATOMIC EMISSION-SPECTROSCOPY

被引：10
作者：
LEVY, RA
KOMETANI, TY
机构：
[1] AT&T Bell Lab, Murray Hill, NJ,, USA, AT&T Bell Lab, Murray Hill, NJ, USA
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 06期
关键词：
FILMS - Spectroscopic Analysis - SPECTROSCOPY; EMISSION; -; Applications;
D O I：
10.1149/1.2100709
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
This study describes the use of inductively coupled plasma-atomic emission spectroscopy (ICP-AES) as an analytical technique for determining the composition of borophosphosilicate glass films. Results indicate that this technique can provide precise multielemental analysis of solutions of small film samples. Concentrations of boron and phosphorus determined by this technique are shown to be consistent with results obtained by electron microprobe analysis.
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收藏
页码：1565 / 1567
页数：3
相关论文
共 11 条
[1]   PROCESS AND FILM CHARACTERIZATION OF LOW-PRESSURE TETRAETHYLORTHOSILICATE-BOROPHOSPHOSILICATE GLASS [J].
BECKER, FS ;
PAWLIK, D ;
SCHAFER, H ;
STAUDIGL, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (03) :732-744
[2]   QUANTITATIVE-DETERMINATION OF BORON AND PHOSPHORUS IN BOROPHOSPHOSILICATE GLASS BY SECONDARY ION MASS-SPECTROMETRY [J].
CHU, PK ;
GRUBE, SL .
ANALYTICAL CHEMISTRY, 1985, 57 (06) :1071-1074
[3]   SIMULTANEOUS OR SEQUENTIAL DETERMINATION OF THE ELEMENTS AT ALL CONCENTRATION LEVELS - RENAISSANCE OF AN OLD APPROACH [J].
FASSEL, VA .
ANALYTICAL CHEMISTRY, 1979, 51 (13) :1290-&
[4]  
KERN W, 1971, RCA REV, V32, P429
[5]  
KERN W, 1982, RCA REV, V43, P423
[6]  
KERN W, 1985, SOLID STATE TECHNOL, V28, P171
[7]   A NEW LPCVD TECHNIQUE OF PRODUCING BOROPHOSPHOSILICATE GLASS-FILMS BY INJECTION OF MISCIBLE LIQUID PRECURSORS [J].
LEVY, RA ;
GALLAGHER, PK ;
SCHREY, F .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (02) :430-437
[8]  
LEVY RA, 1986, SOLID STATE TECHNOL, V29, P123
[9]   REFLOW MECHANISMS OF CONTACT VIAS IN VLSI PROCESSING [J].
LEVY, RA ;
NASSAU, K .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (07) :1417-1424
[10]   COMPOSITION OF PHOSPHOSILICATE GLASS BY INFRARED-ABSORPTION [J].
TENNEY, AS ;
GHEZZO, M .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (09) :1276-1279
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