共 11 条
[1]
EBERHARDT MK, 1967, RADIOCHIM ACTA, V8, P159
[2]
SUBSTITUENT POSITIONAL VARIATIONS AND THE LITHOGRAPHIC PROPERTIES OF POLY(METHYLSTYRENE-CO-CHLOROMETHYLSTYRENE) RESIST SYSTEMS
[J].
MAKROMOLEKULARE CHEMIE-MACROMOLECULAR SYMPOSIA,
1989, 24
:201-207
[3]
GRIFFITHS LG, 1988, POLYM COMMUN, V29, P173
[4]
HAYOMAKI J, 1977, ACTA CHEM SCAND A, V31, P321
[7]
THERMOLABILE HYDROCARBONS .20. SYNTHESIS, STRUCTURE, AND STRAIN OF SYM TETRAALKYL-1,2-DIARYLETHANES
[J].
CHEMISCHE BERICHTE-RECUEIL,
1983, 116 (09)
:3235-3263
[8]
AN INVESTIGATION OF THE LITHOGRAPHIC PROPERTIES OF THE POLY (P-METHYLSTYRENE-CO-CHLOROMETHYLSTYRENE) RESIST SYSTEM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (01)
:339-342
[9]
TABATA Y, 1984, MATERIALS MICROLITHO, P151