A SCALED SIGMUND THEORY MODEL FOR DETERMINING SPUTTER RATIOS

被引:4
作者
ALTON, GD
OLIVE, DH
PINKHAM, ML
OLIVE, JR
机构
[1] VANDERBILT UNIV,NASHVILLE,TN 37240
[2] LOYOLA UNIV,NEW ORLEANS,LA 70118
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1993年 / 126卷 / 1-4期
关键词
D O I
10.1080/10420159308219736
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
[No abstract available]
引用
收藏
页码:331 / 336
页数:6
相关论文
共 18 条
[1]  
Andersen H. H., 1973, Radiation Effects, V19, P139, DOI 10.1080/00337577308232233
[2]  
ANDERSON HH, 1981, TOPICS APPLIED PHYSI, pCH4
[3]   ENERGY-DEPENDENCE OF GOLD SELF-SPUTTERING [J].
BAY, HL ;
ANDERSEN, HH ;
HOFER, WO ;
NIELSEN, O .
NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :301-305
[4]   AN ANALYTICAL FORMULA AND IMPORTANT PARAMETERS FOR LOW-ENERGY ION SPUTTERING [J].
BOHDANSKY, J ;
ROTH, J ;
BAY, HL .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (05) :2861-2865
[5]   SPIKE AND SHOCK PROCESSES IN HIGH-ENERGY DEPOSITION DENSITY ATOMIC COLLISION EVENTS IN SOLIDS [J].
CARTER, G .
RADIATION EFFECTS LETTERS, 1979, 43 (4-5) :193-199
[6]   EMISSION OF ATOMS AND ELECTRONS FROM HIGH-DENSITY COLLISION CASCADES IN METALS [J].
HOFER, WO .
NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3) :275-279
[7]   MASS DEPENDENCE OF THE SPUTTERING YIELD - BOUNDARY EFFECT [J].
IMADA, M .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1978, 45 (06) :1957-1964
[8]   SPIKE EFFECTS IN HEAVY-ION SPUTTERING OF AG, AU AND PT THIN-FILMS [J].
JOHAR, SS ;
THOMPSON, DA .
SURFACE SCIENCE, 1979, 90 (02) :319-330
[9]   A SEMI-EMPIRICAL FORMULA FOR THE ENERGY-DEPENDENCE OF THE SPUTTERING YIELD [J].
MATSUNAMI, N ;
YAMAMURA, Y ;
ITIKAWA, Y ;
ITOH, N ;
KAZUMATA, Y ;
MIYAGAWA, S ;
MORITA, K ;
SHIMIZU, R .
RADIATION EFFECTS LETTERS, 1980, 57 (1-2) :15-21
[10]   SPUTTERING YIELDS FOR LOW ENERGY HE+-, KR+-, AND XE+-ION BOMBARDMENT [J].
ROSENBERG, D ;
WEHNER, GK .
JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) :1842-&