EXPERIMENTAL AND COMPUTER STUDY OF THE SPATIAL DISTRIBUTIONS OF PARTICLES SPUTTERED FROM POLYCRYSTALS

被引：12

作者：

DODONOV, AI ^{[1
]}

FAYAZOV, IM ^{[1
]}

FEDOROVICH, SD ^{[1
]}

KRYLOVA, EA ^{[1
]}

MASKOVA, ES ^{[1
]}

MOLCHANOV, VA ^{[1
]}

ECKSTEIN, W ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 49卷 / 03期

关键词：

D O I：

10.1007/BF00616858

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：299 / 304

页数：6

共 14 条

[1]

Auciello O., 1986, Erosion and Growth of Solids Stimulated by Atom and Ion Beams. Proceedings of the NATO Advanced Study Institute, P394

[2] SPHERICAL ANGULAR-DISTRIBUTION OF ATOMS SPUTTERED WITH ENERGETIC DEUTERIUM AT GRAZING-INCIDENCE [J].

BECERRAACEVEDO, R ;

BOHDANSKY, J ;

ECKSTEIN, W ;

ROTH, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :631-634

[3]

BEHRISCH R, 1981, TOPICS APPLIED PHYSI, V47

[4] COMPUTER-SIMULATIONS OF SPUTTERING [J].

BIERSACK, JP .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 27 (01) :21-36

[5] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].

BIERSACK, JP ;

ECKSTEIN, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94

[6] SPATIAL DISTRIBUTIONS OF SPUTTERED PARTICLES UNDER ION-BOMBARDMENT OF POLYCRYSTALS [J].

DODONOV, AI ;

FEDOROVICH, SD ;

KRYLOVA, EA ;

MASHKOVA, ES ;

MOLCHANOV, VA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) :534-537

[7] SPATIAL-DISTRIBUTION OF SPUTTERED PARTICLES FROM POLYCRYSTALS UNDER ION-BOMBARDMENT [J].

DODONOV, AI ;

FEDOROVICH, SD ;

KRYLOVA, EA ;

MASHKOVA, ES ;

MOLCHANOV, VA .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1988, 107 (01) :15-21

[8]

DODONOV AI, 1986, POVERKHNOST, V9, P33

[9]

DODONOV AI, 1988, POVERCHNOST, V7, P133

[10]

EINSPRUCH NG, 1984, VLSI ELECTRONICS MIC, V8

← 1 2 →