DRY DEVELOPMENT OF SE-GE INORGANIC PHOTORESIST

被引：65

作者：

YOSHIKAWA, A

OCHI, O

MIZUSHIMA, Y

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 01期

关键词：

D O I：

10.1063/1.91294

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：107 / 109

页数：3

相关论文

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APPLIED PHYSICS LETTERS, 1976, 29 (10) :677-679

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