DETERMINATION OF LIGHTER IMPURITIES ON SILICON BY 90 DEGREES FORWARD ION SCATTERING THROUGH THIN TARGETS

被引：4

作者：

MEEK, RL

GIBSON, WM

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1972年 / 98卷 / 02期

关键词：

D O I：

10.1016/0029-554X(72)90122-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

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页码：375 / &

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