MONITORING OF INTERNAL GETTERING DURING BIPOLAR PROCESSES

[1] REDUCTION OF IRON SOLUBILITY IN SILICON WITH OXYGEN PRECIPITATES [J]. APPLIED PHYSICS LETTERS, 1986, 48 (20) : 1371 - 1373

[2] GOSELE U, 1985, MATER RES SOC S P, V36, P105

[3] GOSELE U, 1983, ELECTROCHEMICAL SOC, P17

[4] PRECISE EVALUATION OF OXYGEN MEASUREMENTS ON CZ-SILICON WAFERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) : 1378 - 1381

[5] GRAFF K, 1985, MATER RES SOC S P, V36, P19

[6] GRAFF K, 1986, ELECTROCHEMICAL SOC, P751

[7] HUFF HR, 1985, SOLID STATE TECH MAR, P103

[8] INTERNAL GETTERING IN BIPOLAR PROCESS - EFFECT ON CIRCUIT PERFORMANCE AND RELATIONSHIP TO OXYGEN PRECIPITATION KINETICS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (12) : 2944 - 2953

[9] PINIZOTTO RF, 1985, MRS S P, V36, P275

[10] INTRINSIC GETTERING BY OXIDE PRECIPITATE INDUCED DISLOCATIONS IN CZOCHRALSKI SI [J]. APPLIED PHYSICS LETTERS, 1977, 30 (04) : 175 - 176

[1] REDUCTION OF IRON SOLUBILITY IN SILICON WITH OXYGEN PRECIPITATES [J]. APPLIED PHYSICS LETTERS, 1986, 48 (20) : 1371 - 1373

[2] GOSELE U, 1985, MATER RES SOC S P, V36, P105

[3] GOSELE U, 1983, ELECTROCHEMICAL SOC, P17

[4] PRECISE EVALUATION OF OXYGEN MEASUREMENTS ON CZ-SILICON WAFERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) : 1378 - 1381

[5] GRAFF K, 1985, MATER RES SOC S P, V36, P19

[6] GRAFF K, 1986, ELECTROCHEMICAL SOC, P751

[7] HUFF HR, 1985, SOLID STATE TECH MAR, P103

[8] INTERNAL GETTERING IN BIPOLAR PROCESS - EFFECT ON CIRCUIT PERFORMANCE AND RELATIONSHIP TO OXYGEN PRECIPITATION KINETICS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (12) : 2944 - 2953

[9] PINIZOTTO RF, 1985, MRS S P, V36, P275

[10] INTRINSIC GETTERING BY OXIDE PRECIPITATE INDUCED DISLOCATIONS IN CZOCHRALSKI SI [J]. APPLIED PHYSICS LETTERS, 1977, 30 (04) : 175 - 176