USING MIS CAPACITOR FOR DOPING PROFILE MEASUREMENTS WITH MINIMAL INTERFACE STATE ERROR

被引：19

作者：

NICOLLIAN, EH ^{[1
]}

HANES, MH ^{[1
]}

BREWS, JR ^{[1
]}

机构：

[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1973年 / ED20卷 / 04期

关键词：

D O I：

10.1109/T-ED.1973.17659

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：380 / 389

页数：10

共 21 条

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