MINIATURE CANTILEVER BEAMS FABRICATED BY ANISOTROPIC ETCHING OF SILICON

被引：22

作者：

JOLLY, RD

MULLER, RS

机构：

[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 12期

关键词：

D O I：

10.1149/1.2129585

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2750 / 2754

页数：5

共 9 条

[1] MODELS FOR COMPUTER-SIMULATION OF COMPLETE IC FABRICATION PROCESS [J].

ANTONIADIS, DA ;

DUTTON, RW .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (04) :490-500

[2] A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON [J].

FINNE, RM ;

KLEIN, DL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) :965-&

[3]

KWAN SH, 1978, THESIS U CALIFORNIA

[4] DYNAMIC MICROMECHANICS ON SILICON - TECHNIQUES AND DEVICES [J].

PETERSEN, KE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) :1241-1250

[5] MICROMECHANICAL LIGHT-MODULATOR ARRAY FABRICATED ON SILICON [J].

PETERSEN, KE .

APPLIED PHYSICS LETTERS, 1977, 31 (08) :521-523

[6] MICROMECHANICAL MEMBRANE SWITCHES ON SILICON [J].

PETERSEN, KE .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1979, 23 (04) :376-385

[7]

ROSSVOLD W, 1977, AF77152 AV LAB TECH

[8] BATCH-FABRICATED SILICON ACCELEROMETER [J].

ROYLANCE, LM ;

ANGELL, JB .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) :1911-1917

[9] BUCKLING OF THERMALLY-GROWN SIO2 THIN-FILMS [J].

WILMSEN, CW ;

THOMPSON, EG ;

MEISSNER, GH .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1972, ED19 (01) :122-&

← 1 →