SECONDARY ION MASS-SPECTROMETRY STUDY OF PD-BASED OHMIC CONTACTS TO GAAS AND ALGAAS/GAAS

被引：20

作者：

CHEN, CL

HOLLIS, MA

MAHONEY, LJ

GOODHUE, WD

MANFRA, MJ

MURPHY, RA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.583687

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：902 / 907

页数：6

共 11 条

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