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- [4] GOLDBERG YA, 1970, SOV PHYS SEMICOND+, V3, P1447
- [5] Lepselter M. P., 1969, Ohmic contacts to semiconductors, P159
- [7] CONTROL OF RESISTIVITY, MICROSTRUCTURE, AND STRESS IN ELECTRON-BEAM EVAPORATED TUNGSTEN FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (03): : 436 - 444