ELECTRON-BEAM ENHANCED GROWTH OF CVD-DEPOSITED SILICON ON ALUMINA

被引：6

作者：

HEINEMANN, K

OSAKA, T

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1982年 / 59卷 / 03期

关键词：

D O I：

10.1016/0022-0248(82)90369-4

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：485 / 498

页数：14

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