INVERSION LAYER MOBILITY OF MOSFETS WITH NITRIDED OXIDE GATE DIELECTRICS

被引:62
作者
SCHMIDT, MA [1 ]
TERRY, FL [1 ]
MATHUR, BP [1 ]
SENTURIA, SD [1 ]
机构
[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173
关键词
D O I
10.1109/16.7364
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1627 / 1632
页数:6
相关论文
共 26 条
  • [1] PROPERTIES OF SIXOYNZ FILMS ON SI
    BROWN, DM
    GRAY, PV
    HEUMANN, FK
    PHILIPP, HR
    TAFT, EA
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (03) : 311 - &
  • [2] CAPTURE AND TUNNEL EMISSION OF ELECTRONS BY DEEP LEVELS IN ULTRATHIN NITRIDED OXIDES ON SILICON
    CHANG, ST
    JOHNSON, NM
    LYON, SA
    [J]. APPLIED PHYSICS LETTERS, 1984, 44 (03) : 316 - 318
  • [3] Chang T. T. L., 1982, International Electron Devices Meeting. Technical Digest
  • [4] STUDY OF ELECTRICAL CHARACTERISTICS ON THERMALLY NITRIDED SIO2 (NITROXIDE) FILMS
    CHEN, CT
    TSENG, FC
    CHANG, CY
    LEE, MK
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (04) : 875 - 877
  • [5] DUMIN DJ, 1983, ELECTROCHEM SOC EXTE, P202
  • [6] A SIMPLE-MODEL FOR SEPARATING INTERFACE AND OXIDE CHARGE EFFECTS IN MOS DEVICE CHARACTERISTICS
    GALLOWAY, KF
    GAITAN, M
    RUSSELL, TJ
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1984, 31 (06) : 1497 - 1501
  • [7] Grinolds H. R., 1982, International Electron Devices Meeting. Technical Digest, P42
  • [8] EFFECT OF THERMALLY NITRIDED SIO2 (NITROXIDE) ON MOS CHARACTERISTICS
    ITO, T
    NAKAMURA, T
    ISHIKAWA, H
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (01) : 184 - 188
  • [9] Jayaraman R., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P668
  • [10] Jenq C. S., 1982, International Electron Devices Meeting. Technical Digest, P811