DEPTH RESOLUTION IMPROVEMENTS USING SPECIMEN ROTATION DURING DEPTH PROFILING

被引：24

作者：

GELLER, JD ^{[1
]}

VEISFELD, N ^{[1
]}

机构：

[1] DIGITAL EQUIPMENT CORP,NORTHBORO,MA 01532

来源：

关键词：

D O I：

10.1002/sia.740140119

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：95 / 98

页数：4

共 12 条

[1] Blattner R. J., 1979, Surface and Interface Analysis, V1, P32, DOI 10.1002/sia.740010107
[2] GELLER JD, 1984, APPL SURF SCI, V18, P18, DOI 10.1016/0378-5963(84)90036-9
[3] DETERMINATION OF DEPTH RESOLUTION FROM MEASURED SPUTTERING PROFILES OF MULTILAYER STRUCTURES - EQUATIONS AND APPROXIMATIONS
HOFMANN, S
[J]. SURFACE AND INTERFACE ANALYSIS, 1986, 8 (02) : 87 - 89
[4] HOFMANN S, 1984, TOPICS CURRENT PHYSI, V37
[5] LIMITATIONS OF ION ETCHING FOR INTERFACE ANALYSIS
HOLLOWAY, PH
BHATTACHARYA, RS
[J]. SURFACE AND INTERFACE ANALYSIS, 1981, 3 (03) : 118 - 125
[6] HONIG RE, 1978, 26TH P ANN C MASS SP, P207
[7] NICKEL CHROMIUM INTERFACE RESOLUTION IN AUGER DEPTH PROFILES
MITCHELL, DF
SPROULE, GI
[J]. SURFACE SCIENCE, 1986, 177 (01) : 238 - 252
[8] IMPROVED SPUTTER-DEPTH PROFILES USING 2 ION GUNS
SYKES, DE
HALL, DD
THURSTANS, RE
WALLS, JM
[J]. APPLIED SURFACE SCIENCE, 1980, 5 (01) : 103 - 106
[9] ION SPUTTERING YIELD MEASUREMENTS FOR SUBMICROMETER THIN-FILMS
VEISFELD, N
GELLER, JD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 2077 - 2081
[10] IMPROVED DEPTH RESOLUTION BY SAMPLE ROTATION DURING AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING
ZALAR, A
[J]. THIN SOLID FILMS, 1985, 124 (3-4) : 223 - 230