DETERMINATION OF DEPTH RESOLUTION FROM MEASURED SPUTTERING PROFILES OF MULTILAYER STRUCTURES - EQUATIONS AND APPROXIMATIONS

被引：47

作者：

HOFMANN, S

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1986年 / 8卷 / 02期

关键词：

D O I：

10.1002/sia.740080209

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

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页码：87 / 89

页数：3

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共 11 条

[1] CHARACTERIZATION OF NBS STANDARD REFERENCE MATERIAL 2135 FOR SPUTTER DEPTH PROFILE ANALYSIS
FINE, J
NAVINSEK, B
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1985, 3 (03): : 1408 - 1412
[2] DEPTH RESOLUTION IN ION SPUTTERING - AN ASPECT OF QUANTITATIVE MICROANALYSIS
GIBER, J
MARTON, D
LASZLO, J
[J]. JOURNAL DE PHYSIQUE, 1984, 45 (NC-2): : 115 - 118
[3] DEPTH RESOLUTION AND SURFACE-ROUGHNESS EFFECTS IN SPUTTER PROFILING OF NICR MULTILAYER SANDWICH SAMPLES USING AUGER-ELECTRON SPECTROSCOPY
HOFMANN, S
ERLEWEIN, J
ZALAR, A
[J]. THIN SOLID FILMS, 1977, 43 (03) : 275 - 283
[4] AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING OF NI-CR MULTILAYERS BY SPUTTERING WITH N-2+ IONS
HOFMANN, S
ZALAR, A
[J]. THIN SOLID FILMS, 1979, 60 (02) : 201 - 211
[5] Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406
[6] HOFMANN S, 1977, 7TH P INT VAC C 3RD, V3, P2613
[7] Hofmann S, 1983, PRACTICAL SURFACE AN, P141
[8] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN COMPOSITION DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY
SEAH, MP
HUNT, CP
[J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (01) : 33 - 37
[9] DEPTH RESOLUTION IN COMPOSITION PROFILES BY ION SPUTTERING AND SURFACE-ANALYSIS FOR SINGLE-LAYER AND MULTILAYER STRUCTURES ON REAL SUBSTRATES
SEAH, MP
LEA, C
[J]. THIN SOLID FILMS, 1981, 81 (03) : 257 - 270
[10] IMPROVED DEPTH RESOLUTION BY SAMPLE ROTATION DURING AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING
ZALAR, A
[J]. THIN SOLID FILMS, 1985, 124 (3-4) : 223 - 230