LINEAR INTERPOLATION OF PERIODIC ERROR IN A HETERODYNE LASER INTERFEROMETER AT SUBNANOMETER LEVELS

被引：68

作者：

TANAKA, M ^{[1
]}

YAMAGAMI, T ^{[1
]}

NAKAYAMA, K ^{[1
]}

机构：

[1] HOYA CORP,CTR DEV,TOKYO,JAPAN

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1989年 / 38卷 / 02期

关键词：

D O I：

10.1109/19.192345

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：552 / 554

页数：3

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[7] A NEW OPTICAL INTERFEROMETER FOR ABSOLUTE MEASUREMENT OF LINEAR DISPLACEMENT IN THE SUBNANOMETER RANGE [J].

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