CRACKING OF SIO2 LAYERS ON ANNEALED INP

被引：9

作者：

OBERSTAR, JD

STREETMAN, BG

SAMMANN, EA

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

THIN SOLID FILMS | 1981年 / 81卷 / 04期

关键词：

D O I：

10.1016/0040-6090(81)90519-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：347 / 356

页数：10

共 29 条

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