EFFECT OF DEPOSITION PARAMETERS ON RF-SPUTTERED COZR AND COZRRE THIN-FILMS FOR MAGNETIC RECORDING-HEADS

被引：15

作者：

GUZMAN, JI

KRYDER, MH

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 08期

关键词：

D O I：

10.1063/1.338915

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3240 / 3242

页数：3

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