BISRCACUO THIN-FILM GROWN ON SRTIO3 SUBSTRATE WITH OFF-ORIENTED (110) SURFACE

被引：15

作者：

KURODA, K ^{[1
]}

WADA, O ^{[1
]}

TANIMURA, J ^{[1
]}

KOJIMA, K ^{[1
]}

TAKAMI, T ^{[1
]}

KATAOKA, M ^{[1
]}

OGAMA, T ^{[1
]}

HAMANAKA, K ^{[1
]}

机构：

[1] MITSUBISHI ELECTR CO,MAT & ELECTR DEVICES LAB,AMAGASAKI,HYOGO 661,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1991年 / 30卷 / 4A期

关键词：

BISRCACUO; SUPERCONDUCTOR; THIN FILMS; SPUTTERING; PREFERENTIAL ORIENTATION; OFF-ORIENTED SUBSTRATE;

D O I：

10.1143/JJAP.30.L582

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A Bi2(Sr, Ca)3Cu2O(x) thin film with the (117) orientation was formed on a slightly off-oriented (110)SrTiO3 substrate by single-target sputtering. The (110) substrate off-oriented by 5-degrees is considered to have limited film growth in one direction. From RHEED and cross-sectional TEM observations, it was found that the c-axis of the film tilts against the substrate surface by 46-47-degrees and the SrTiO3(110) plane by 41-42-degrees. Also, the surface morphology observed by SEM has been much improved.

引用

页码：L582 / L584

页数：3

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