SILICIDE FORMATION WITH CODEPOSITED TITANIUM-TANTALUM ALLOYS ON SILICON

被引：16

作者：

CAPIO, CD ^{[1
]}

WILLIAMS, DS ^{[1
]}

MURARKA, SP ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,CTR INTEGRATED ELECT,DEPT MAT ENGN,TROY,NY 12180

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 04期

关键词：

D O I：

10.1063/1.339678

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1257 / 1264

页数：8

共 21 条

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[17]

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[18]

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[19] SHALLOW SILICIDE CONTACT [J].

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