ELECTRON-TRANSPORT ACROSS ALUMINUM ULTRATHIN SILICON-OXIDE PHOSPHORUS IMPLANTED SILICON BARRIERS

被引：9

作者：

KIKUCHI, A ^{[1
]}

YAMAMOTO, H ^{[1
]}

IWATA, S ^{[1
]}

IKEDA, T ^{[1
]}

NAKATA, K ^{[1
]}

机构：

[1] HITACHI LTD,CTR DEVICE DEV,KODAIRA,TOKYO 187,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 09期

关键词：

D O I：

10.1063/1.328364

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：4913 / 4918

页数：6

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