共 20 条
[4]
Azzam R. M. A., 1977, ELLIPSOMETRY POLARIZ
[8]
Drude P, 1889, ANN PHYS CHEM, V272, P532
[10]
INSITU REAL-TIME ELLIPSOMETRY FOR FILM THICKNESS MEASUREMENT AND CONTROL
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1992, 10 (04)
:934-938