OPTICAL CHARACTERIZATION OF DEEP O IMPLANTS IN GAAS

被引：23

作者：

MONEMAR, B ^{[1
]}

BLUM, JM ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1063/1.323873

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1529 / 1537

页数：9

共 65 条

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