ELECTRON-BEAM LITHOGRAPHY USING SURFACE-REACTIONS WITH CIF3

被引：7

作者：

MATSUI, S

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 02期

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D O I：

10.1063/1.102123

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：134 / 136

页数：3

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