CHARACTERIZATION OF RF-SPUTTERED SNOX THIN-FILMS BY ELECTRON-MICROSCOPY, HALL-EFFECT MEASUREMENT, AND MOSSBAUER SPECTROMETRY

被引:50
作者
STJERNA, B
GRANQVIST, CG
SEIDEL, A
HAGGSTROM, L
机构
[1] UNIV GOTHENBURG, S-41296 GOTHENBURG, SWEDEN
[2] UNIV UPPSALA, DEPT PHYS, S-75121 UPPSALA, SWEDEN
关键词
D O I
10.1063/1.346889
中图分类号
O59 [应用物理学];
学科分类号
摘要
SnO(x) films, made by reactive rf magnetron sputtering onto unheated glass, were studied by electron microscopy, Hall-effect measurements, and Mossbauer spectrometry. Transmission electron microscopy showed that the films were polycrystalline with a grain size of approximately 15 nm. Hall-effect measurements gave a sharp resistivity minimum (down to 2.8 X 10(-3) OMEGA-cm) and electron concentration maximum (up to 1.2 X 10(20) cm(-3) at a specific O2/Ar gas-flow ratio during sputtering. Mossbauer spectrometry indicated that the most conducting films only consisted of the SnO2 phase, and that a SnO phase appeared at low O2/Ar ratio where it lowered the conductivity.
引用
收藏
页码:6241 / 6245
页数:5
相关论文
共 30 条
  • [21] DIFFRACTION-ANALYSIS AND MOSSBAUER-ANALYSIS OF SNOX FILMS
    NEUMANN, HG
    ZEGGEL, P
    MELZER, K
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 108 (01) : 128 - 134
  • [22] TIN DIOXIDE WITH THE CAF2 STRUCTURE IN THIN TIN OXIDE-FILMS
    PENEVA, SK
    RUDARSKA, RK
    NIHTIANOVA, DD
    AVRAMOV, I
    [J]. THIN SOLID FILMS, 1984, 112 (03) : 247 - 255
  • [23] ELECTRONIC-STRUCTURE OF SNO2, GEO2, PBO2, TEO2 AND MGF2
    ROBERTSON, J
    [J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1979, 12 (22): : 4767 - 4776
  • [24] CHARACTERIZATION OF TIN OXIDE THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING
    STEDILE, FC
    DEBARROS, BAS
    LEITE, CVB
    FREIRE, FL
    BAUMVOL, IJR
    SCHREINER, WH
    [J]. THIN SOLID FILMS, 1989, 170 (02) : 285 - 291
  • [25] TRANSPARENT CONDUCTING SNOX FILMS HIGH-RATE REACTIVELY SPUTTERED ONTO POLYESTER FOIL
    STJERNA, B
    GRANQVIST, CG
    [J]. APPLIED OPTICS, 1990, 29 (04): : 447 - 448
  • [26] ELECTRICAL-CONDUCTIVITY AND OPTICAL TRANSMITTANCE OF SPUTTER-DEPOSITED SNOX THIN-FILMS
    STJERNA, B
    GRANQVIST, CG
    [J]. SOLAR ENERGY MATERIALS, 1990, 20 (03): : 225 - 233
  • [27] STJERNA B, IN PRESS APPL PHYS L
  • [28] TAFTO J, 1986, J APPL PHYS, V60, P602, DOI 10.1063/1.337454
  • [29] Van de Pauw L.J., 1958, PHILIPS RES REP, V13, P1
  • [30] 1975, LANDOLTBORNSTEIN NUM, V3, P277