TRANSPARENT CONDUCTING SNOX FILMS HIGH-RATE REACTIVELY SPUTTERED ONTO POLYESTER FOIL

被引:17
作者
STJERNA, B [1 ]
GRANQVIST, CG [1 ]
机构
[1] GOTHENBURG UNIV,DEPT PHYS,S-41346 GOTHENBURG,SWEDEN
来源
APPLIED OPTICS | 1990年 / 29卷 / 04期
关键词
D O I
10.1364/AO.29.000447
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
[No abstract available]
引用
收藏
页码:447 / 448
页数:2
相关论文
共 11 条
[1]   INFLUENCE OF ANNEALING ON THE PHASE-COMPOSITION, TRANSMISSION AND RESISTIVITY OF SNOX THIN-FILMS [J].
BEENSHMARCHWICKA, G ;
KROLSTEPNIEWSKA, L ;
MISIUK, A .
THIN SOLID FILMS, 1984, 113 (03) :215-224
[2]   HIGH-RATE PLANAR MAGNETRON DEPOSITION OF TRANSPARENT, CONDUCTING, AND HEAT REFLECTING FILMS ON GLASS AND PLASTIC [J].
BRETT, MJ ;
MCMAHON, RW ;
AFFINITO, J ;
PARSONS, RR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :352-355
[3]   DETERMINATION OF OPTICAL-PROPERTIES OF SNO2 FILMS [J].
DEMICHELIS, F ;
MINETTIMEZZETTI, E ;
TAGLIAFERRO, A ;
TRESSO, E .
NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1984, 4 (01) :68-78
[4]   INFRARED OPTICAL-PROPERTIES OF SILICON OXYNITRIDE FILMS - EXPERIMENTAL-DATA AND THEORETICAL INTERPRETATION [J].
ERIKSSON, TS ;
GRANQVIST, CG .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (06) :2081-2091
[5]   ELECTRICAL-PROPERTIES OF HIGHLY CONDUCTING AND TRANSPARENT THIN-FILMS OF MAGNETRON SPUTTERED SNO2 [J].
GOODCHILD, RG ;
WEBB, JB ;
WILLIAMS, DF .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (06) :2308-2310
[6]   PROPERTIES OF SN-DOPED INDIUM OXIDE COATINGS DEPOSITED ON POLYESTER FILM BY HIGH-RATE REACTIVE SPUTTERING [J].
ITOYAMA, K .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) :691-694
[7]   TRANSPARENT AND INFRARED-REFLECTING ZNO-AL FILMS REACTIVELY SPUTTERED ONTO POLYESTER FOIL [J].
JIN, ZC ;
GRANQVIST, CG .
APPLIED OPTICS, 1987, 26 (16) :3191-3192
[8]   HIGHLY CONDUCTING AND TRANSPARENT SNO2 THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING ON LOW-TEMPERATURE SUBSTRATES [J].
MINAMI, T ;
NANTO, H ;
TAKATA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (03) :L287-L289
[9]   REACTIVE HIGH-RATE SPUTTERING OF OXIDES [J].
MUNZ, WD ;
HEIMBACH, J ;
REINECK, SR .
THIN SOLID FILMS, 1981, 86 (2-3) :175-181
[10]  
STJERNA B, IN PRESS SOLAR ENERG