HIGH-RATE PLANAR MAGNETRON DEPOSITION OF TRANSPARENT, CONDUCTING, AND HEAT REFLECTING FILMS ON GLASS AND PLASTIC

被引：51

作者：

BRETT, MJ

MCMAHON, RW

AFFINITO, J

PARSONS, RR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.572133

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：352 / 355

页数：4

共 12 条

[1]

CAPORALETTI O, 1982, SOLID STATE COMMUN, V421, P109

[2] TRANSPARENT HEAT MIRRORS FOR SOLAR-ENERGY APPLICATIONS [J].

FAN, JCC ;

BACHNER, FJ .

APPLIED OPTICS, 1976, 15 (04) :1012-1017

[3] ELECTRICAL-PROPERTIES AND DEFECT MODEL OF TIN-DOPED INDIUM OXIDE LAYERS [J].

FRANK, G ;

KOSTLIN, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 27 (04) :197-206

[4] DEPOSITION OF TRANSPARENT HEAT-REFLECTING COATINGS OF METAL-OXIDES USING REACTIVE PLANAR MAGNETRON SPUTTERING OF A METAL AND-OR ALLOY [J].

HOWSON, RP ;

RIDGE, MI .

THIN SOLID FILMS, 1981, 77 (1-3) :119-125

[5] HEAT MIRROR COATINGS FOR ENERGY CONSERVING WINDOWS [J].

LAMPERT, CM .

SOLAR ENERGY MATERIALS, 1981, 6 (01) :1-41

[6]

MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH4

[7] HIGH-RATE DEPOSITION OF TRANSPARENT CONDUCTING FILMS BY MODIFIED REACTIVE PLANAR MAGNETRON SPUTTERING OF CD2SN ALLOY [J].

MANIV, S ;

MINER, C ;

WESTWOOD, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :195-198

[8] VOLTAGE-CONTROLLED, REACTIVE PLANAR MAGNETRON SPUTTERING OF AIN THIN-FILMS [J].

MCMAHON, R ;

AFFINITO, J ;

PARSONS, RR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :376-378

[9] THE PREPARATION AND SOME PROPERTIES OF TRANSPARENT CONDUCTING ZNO FOR USE IN SOLAR-CELLS [J].

MORGAN, JH ;

BRODIE, DE .

CANADIAN JOURNAL OF PHYSICS, 1982, 60 (10) :1387-1390

[10] SUBSTRATE BIASED RF SPUTTERING OF ZINC-OXIDE FILMS [J].

MURTI, DK .

APPLICATIONS OF SURFACE SCIENCE, 1982, 11-2 (JUL) :308-314

← 1 2 →