ENERGY-DISTRIBUTION OF ELECTRON-TRAPPING CENTERS IN LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SI3N4 FILMS

被引：13

作者：

KAPOOR, VJ

BIBYK, SB

机构：

来源：

THIN SOLID FILMS | 1981年 / 78卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90619-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：193 / 201

页数：9

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