XECL LASER ABLATION OF POLYIMIDE - INFLUENCE OF AMBIENT ATMOSPHERE ON PARTICULATE AND GASEOUS PRODUCTS

被引：33

作者：

SINGLETON, DL

PARASKEVOPOULOS, G

IRWIN, RS

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 07期

关键词：

D O I：

10.1063/1.344128

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3324 / 3328

页数：5

共 13 条

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