EFFECT OF CARBON CONTAMINATION ON MICRODEFECT FORMATION IN SIMOX

被引：6

作者：

JASTRZEBSKI, L

CORBOY, JF

MAGEE, CW

THOMAS, JH

IPRI, AC

PETERS, DA

CULLEN, GW

FRIEDMAN, H

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 07期

关键词：

D O I：

10.1149/1.2096112

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1746 / 1751

页数：6

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