DEFINED ETCHING OF CARBON-DIAMOND FILMS ON SILICON USING AN OXYGEN PLASMA WITH TITANIUM MASKING

被引：12

作者：

CHAN, KK ^{[1
]}

AMARATUNGA, GAJ ^{[1
]}

WONG, TKS ^{[1
]}

机构：

[1] UNIV CAMBRIDGE, DEPT ENGN, CAMBRIDGE CB2 1PZ, ENGLAND

来源：

关键词：

D O I：

10.1016/0925-9635(92)90040-U

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A technique for pattern transfer onto carbon-diamond films deposited by radio-frequency plasma-enhanced chemical vapour deposition is reported. Such a technique involves standard photolithography processes and reactive ion etching by oxygen and is compatible with present day microelectronic technology. The patterns transferred are well defined with very good resolution. © 1992.

引用

页码：281 / 284

页数：4

共 13 条

[1] CRYSTALLINE DIAMOND GROWTH IN THIN-FILMS DEPOSITED FROM A CH4-AR RF PLASMA
AMARATUNGA, G
PUTNIS, A
CLAY, K
MILNE, W
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (07) : 634 - 635
[2] SYNTHETIC DIAMOND MICROMECHANICAL MEMBRANES, CANTILEVER BEAMS, AND BRIDGES
DAVIDSON, JL
RAMESHAM, R
ELLIS, C
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (10) : 3206 - 3210
[3] MICROSTRUCTURAL CONTROL OF DIAMOND THIN-FILMS BY MICROLITHOGRAPHIC PATTERNING
DENATALE, JF
FLINTOFF, JF
HARKER, AB
[J]. JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) : 4014 - 4019
[4] SELECTIVE DEPOSITION OF DIAMOND CRYSTALS BY CHEMICAL VAPOR-DEPOSITION USING A TUNGSTEN-FILAMENT METHOD
HIRABAYASHI, K
TANIGUCHI, Y
TAKAMATSU, O
IKEDA, T
IKOMA, K
IWASAKIKURIHARA, N
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (19) : 1815 - 1817
[5] SELECTED-AREA DEPOSITION OF DIAMOND FILMS
INOUE, T
TACHIBANA, H
KUMAGAI, K
MIYATA, K
NISHIMURA, K
KOBASHI, K
NAKAUE, A
[J]. JOURNAL OF APPLIED PHYSICS, 1990, 67 (12) : 7329 - 7336
[6] SELECTIVE NUCLEATION AND GROWTH OF DIAMOND PARTICLES BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION
MA, JS
KAWARADA, H
YONEHARA, T
SUZUKI, J
WEI, J
YOKOTA, Y
HIRAKI, A
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (11) : 1071 - 1073
[7] Maissel LI, 1970, HDB THIN FILM TECHNO
[8] MCQUILLAN AD, 1956, TITANIUM, P246
[9] MOHRI T, 1984, J APPL PHYS, V55, P3276
[10] LARGE GRAIN-SIZE THIN-FILMS OF CARBON WITH DIAMOND STRUCTURE
NAMBA, Y
WEI, J
MOHRI, T
HEIDARPOUR, EA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (01): : 36 - 39

← 1 2 →