NUCLEATION EFFECTS IN VISIBLE-LASER CHEMICAL VAPOR-DEPOSITION

被引：23

作者：

OPRYSKO, MM ^{[1
]}

BERANEK, MW ^{[1
]}

机构：

[1] GOULD INC, RES CTR, ROLLING MEADOWS, IL 60008 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 02期

关键词：

D O I：

10.1116/1.583938

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：496 / 503

页数：8

共 13 条

[1]

BAUERLE D, 1984, LASER PROCESSING DIA, P39

[2] UV LASER PHOTODEPOSITION OF PATTERNED CATALYST FILMS FROM ADSORBATE MIXTURES [J].

EHRLICH, DJ ;

TSAO, JY .

APPLIED PHYSICS LETTERS, 1985, 46 (02) :198-200

[3] ONE-STEP REPAIR OF TRANSPARENT DEFECTS IN HARD-SURFACE PHOTOLITHOGRAPHIC MASKS VIA LASER PHOTODEPOSITION [J].

EHRLICH, DJ ;

OSGOOD, RM ;

SILVERSMITH, DJ ;

DEUTSCH, TF .

ELECTRON DEVICE LETTERS, 1980, 1 (06) :101-103

[4] SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

APPLIED PHYSICS LETTERS, 1981, 38 (11) :946-948

[5]

EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718

[6]

HERMAN IP, 1983, LASER DIAGNOSTICS PH

[7] WAFER-SCALE LASER PANTOGRAPHY .3. FABRICATION OF NORMAL-METAL-OXIDE-SEMICONDUCTOR TRANSISTORS AND SMALL-SCALE INTEGRATED-CIRCUITS BY DIRECT-WRITE LASER-INDUCED PYROLYTIC REACTIONS [J].

MCWILLIAMS, BM ;

HERMAN, IP ;

MITLITSKY, F ;

HYDE, RA ;

WOOD, LL .

APPLIED PHYSICS LETTERS, 1983, 43 (10) :946-948

[8]

OPRYSKO MM, 1985, IEEE ELECTRON DEVICE, V6

[9] LASER MICROCHEMISTRY AND ITS APPLICATION TO ELECTRON-DEVICE FABRICATION [J].

OSGOOD, RM .

ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1983, 34 :77-101

[10] CADMIUM DEPOSITION ON TRANSPARENT SUBSTRATES BY LASER-INDUCED DISSOCIATION OF CD(CH3)2 AT VISIBLE WAVELENGTHS [J].

RYTZFROIDEVAUX, Y ;

SALATHE, RP ;

GILGEN, HH ;

WEBER, HP .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 27 (03) :133-138

← 1 2 →