THE INFLUENCE OF THE PROCESS MODE OF ION-BEAM ASSISTED DEPOSITION ON OXYGEN IMPURITIES IN TITANIUM NITRIDE FILMS

被引：15

作者：

ENSINGER, W

机构：

[1] Universität Heidelberg, Institut für Physikalische Chemie, D-6900 Heidelberg

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 56-7卷

关键词：

D O I：

10.1016/0168-583X(91)96116-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Evaporation combined with ion bombardment (ion beam assisted deposition) was used in three different process modes, sequential, dynamic and rare gas mode, to synthesize TiN films. The purity of the films with respect to oxygen incorporation is compared. A theory based on adsorption kinetics and energetic arguments is proposed which explain the function of simultaneous ion bombardment in reduction of oxygen incorporation and the differences between the modes.

引用

收藏

页码：648 / 651

页数：4

相关论文

共 15 条

[1] INSITU AUGER-ELECTRON SPECTROSCOPY APPLIED TO THE STUDY OF CHEMISORPTION AND DIFFUSION DURING REACTIVE IMPLANTATION OF TITANIUM INTO IRON [J].

BALDWIN, DA ;

SARTWELL, BD ;

SINGER, IL .

APPLIED SURFACE SCIENCE, 1986, 25 (04) :364-379

[2]

Barin I., 1989, THERMOCHEMICAL DATA, Vthird

[3]

BARTH M, 1990, SURFACE MODIFICATION, V3, P195

[4] INTERACTION OF OXYGEN AND NITROGEN WITH CLEAN TRANSITION-METAL SURFACES [J].

FROMM, E ;

MAYER, O .

SURFACE SCIENCE, 1978, 74 (01) :259-275

[5] STIMULATION OF SORPTION ON METAL-FILMS BY MEANS OF RADIATION DEFECTS [J].

GRIGOROV, GI ;

MARTEV, IN ;

TZATZOV, KK .

THIN SOLID FILMS, 1981, 76 (03) :269-272

[6] THICK AND HOMOGENEOUS SURFACE-LAYERS OBTAINED BY REACTIVE ION-BEAM-ENHANCED DEPOSITION [J].

GUZMAN, L ;

GIACOMOZZI, F ;

MARGESIN, B ;

CALLIARI, L ;

FEDRIZZI, L ;

OSSI, PM ;

SCOTONI, M .

MATERIALS SCIENCE AND ENGINEERING, 1987, 90 :349-355

[7] REVIEW OF STICKING COEFFICIENTS AND SORPTION CAPACITIES OF GASES ON TITANIUM FILMS [J].

HARRA, DJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :471-474

[8] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].

KANT, RA ;

SARTWELL, BD ;

SINGER, IL ;

VARDIMAN, RG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :915-919

[9] THE INFLUENCE OF ION-BOMBARDMENT ON REACTIONS BETWEEN TI AND GASEOUS N-2 [J].

KANT, RA ;

SARTWELL, BD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02) :861-867

[10] ION-BEAM MODIFICATION OF TIN FILMS DURING VAPOR-DEPOSITION [J].

KANT, RA ;

SARTWELL, BD .

MATERIALS SCIENCE AND ENGINEERING, 1987, 90 :357-365