PHYSICAL-PROPERTIES OF SPRAY PYROLYZED PURE AND DOPED ZNO THIN-FILMS

被引：28

作者：

PUSHPARAJAH, P ^{[1
]}

AROF, AK ^{[1
]}

RADHAKRISHNA, S ^{[1
]}

机构：

[1] UNIV MALAYA,CTR FDN STUDIES SCI,DIV PHYS,KUALA LUMPUR 59100,MALAYSIA

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1994年 / 27卷 / 07期

关键词：

D O I：

10.1088/0022-3727/27/7/027

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

ZnO and ZnO:Li films (1-3 mum thickness) were deposited on a soda lime glass substrate by a spray pyrolysis technique using ZnCl2 and LiCl as starting materials. Physical properties of these films were studied as a function of substrate temperature T(s) and lithium concentration. The best ZnO film was obtained for T(s) = 400-degrees-C where it exhibits a conductivity of 6.3 x 10(-3) OMEGA-1 cm-1 and a mobility 104 cm2 V-1 s-1. X-ray and EDAX studies confirm that it is possible to obtain good transparent conducting ZnO films preferentially oriented along the c axis. When doped with lithium, amorphous films are obtained.

引用

页码：1518 / 1521

页数：4

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