INFLUENCE OF SUBSTRATE AND TARGET TEMPERATURES ON PROPERTIES OF TRANSPARENT AND CONDUCTIVE DOPED ZNO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING

被引：32

作者：

MINAMI, T

SATO, H

SONODA, T

NANTO, H

TAKATA, S

机构：

来源：

THIN SOLID FILMS | 1989年 / 171卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90637-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：307 / 311

页数：5

共 8 条

[1]

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[8] THE STABILITY OF ALUMINUM-DOPED ZNO TRANSPARENT ELECTRODES FABRICATED BY SPUTTERING [J].

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THIN SOLID FILMS, 1986, 135 (02) :183-187

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