共 6 条
[1]
CIRILLO NC, 1985 INT EL DEV M IE, P317
[2]
FEUER MD, 1980, IEEE T ELECTRON DEV, V33, P1640
[6]
ELECTRON-BEAM FABRICATION OF HIGH-PERFORMANCE INGAAS/INAIAS HETEROJUNCTION INSULATED GATE FIELD-EFFECT TRANSISTORS WITH SUB-MICRON REFRACTORY AIRBRIDGE GATES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:1820-1823