FABRICATION OF 300-A METAL LINES WITH SUBSTRATE-STEP TECHNIQUES

被引：89

作者：

PROBER, DE ^{[1
]}

FEUER, MD ^{[1
]}

GIORDANO, N ^{[1
]}

机构：

[1] YALE UNIV,BECTON CTR,DEPT PHYS,NEW HAVEN,CT 06520

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 01期

关键词：

D O I：

10.1063/1.91716

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：94 / 96

页数：3

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