USE OF FILM-FORMATION MODELS FOR THE INTERPRETATION OF ELLIPSOMETER OBSERVATIONS

被引：31

作者：

MULLER, RH ^{[1
]}

SMITH, CG ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

SURFACE SCIENCE | 1980年 / 96卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(80)90315-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：375 / 400

页数：26

共 23 条

[1] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[2] ANODIC FILMS AND PASSIVATION OF ZINC IN CONCENTRATED POTASSIUM HYDROXIDE SOLUTION [J].

BREITER, MW .

ELECTROCHIMICA ACTA, 1971, 16 (08) :1169-&

[3] TEXTURE GROWTH AND ORIENTATION OF ANODICALLY FORMED SILVER OXIDES [J].

BRIGGS, GWD ;

FLEISCHMANN, M ;

LAX, DJ ;

THIRSK, HR .

TRANSACTIONS OF THE FARADAY SOCIETY, 1968, 64 (551P) :3120-+

[4]

Cottrell FG, 1903, Z PHYS CHEM-STOCH VE, V42, P385

[5] VARIANCE ALGORITHM FOR MINIMIZATION [J].

DAVIDON, WC .

COMPUTER JOURNAL, 1968, 10 (04) :406-&

[6] ERRORS ARISING FROM SURFACE ROUGHNESS IN ELLIPSOMETRIC MEASUREMENT OF REFRACTIVE INDEX OF A SURFACE [J].

FENSTERMAKER, CA ;

MCCRACKIN, FL .

SURFACE SCIENCE, 1969, 16 :85-+

[7]

HEAVENS OS, 1956, OPTICAL PROPERTIES T, P63

[8]

Hunderi O., 1977, J PHYS C C5 S11, V38, pC5

[9]

JAMES F, 1970, METHODS SUBNUCLEAR 3, V4

[10] FAST SELF-COMPENSATING ELIPSOMETER [J].

MATHIEU, HJ ;

MCCLURE, DE ;

MULLER, RH .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1974, 45 (06) :798-802

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